IVE Product No. 105
Semiconductor Exhaust Ventilation
Guidebook
by D. Jeff Burton
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Complete guidance to exhaust ventilation in unique semiconductor applications and facilities. Guidebook provides guidelines for establishing inhouse standards of good practice, training programs, and design criteria. Includes audit guideline for monitoring the performance of ventilation systems. SI and US units. 27 charts, 5 forms, 6 checklists, 2 model specifications. The SCGB is the basis of home study course. See home study courses or call 801-298-8996. ISBN 1-883992-08-7; 200 pages; $59; ©1995. |