IVE Product No. 105
Semiconductor Exhaust Ventilation
Guidebook
by D. Jeff Burton
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Guidance to exhaust ventilation in classic semiconductor applications and facilities. Guidebook provides general guidelines for establishing inhouse standards of good practice, training programs, and design criteria. Includes audit guideline for monitoring the performance of ventilation systems. SI and US units. 27 charts, 5 forms, 6 checklists, 2 model specifications. Note copyright date: 1995. The SCGB is the basis of a DL study course. See DL home study courses or call 801-298-8996. ISBN 1-883992-08-7; 200 pages; Special $59; ©1995. |